The AquaVolt+ provides precise, on-line moisture monitoring for high-purity applications, such as semiconductor manufacturing, specialty gas applications, mobile cart applications, and research and industrial labs.


  • Semiconductor manufacturing
  • Refrigerant gases, such as C3H2F6, CF4, CH2F2, and CH3F, among others, used to etch polysilicon and for Chemical Mechanical Planarization (CMP)
  • Specialty gas applications, including Silane used for wafer deposition and more
  • Hexafluoroethane (C2F6) for semiconductor tool chamber cleaning, removal of silicon dioxide from silicon wafers, and plasma etch
  • Government research and industrial laboratories. Example: DNA research for drug development and genetic therapies
  • Shielding gases for orbital welding
  • Aerospace and military
  • Helium and Nitrogen Gases: ~ 0.5 to 1ppmV for tube trailer moisture verification
  • Pressure Swing Adsorbers (PSAs) used in Helium Recovery
  • Mobile cart applications

Key Facts

  • Rack-mounted precise on-line monitoring of moisture for high-purity applciations

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