Description
The Servopro DF Series is a range of ultra-trace gas analysers.
Models:
- DF-550E: An ultra-trace Coulometric oxygen analyser, the DF-550E is optimized for quality measurements in ultra-high-purity electronic gases.
- DF-560E: With a Lower Detection Limit (LDL) of 45 parts-per-trillion (ppt), the DF-560E provides the semiconductor industry with industry-best oxygen (O2) measurements for quality control in ultra-high-purity (UHP) electronic grade gas.
- DF-560E ULTRA: Now the exceptional Lower Detection Limit (LDL) of 45 parts-per-trillion (ppt) of the DF-560E ULTRA is displayed on the front screen. Once the DF-560E ULTRA is measuring below 1 ppb the units automatically convert to ppt providing the semiconductor industry with industry-best oxygen (O2) measurements for quality control in ultra-high-purity (UHP) electronic grade gas.
- DF-730: The DF-730 is an ultra-trace moisture analyser that monitors the electronics-grade, high-purity hydrogen chloride (HCl) gas used in semiconductor fabs.
- DF-740: A trace moisture analyser using Tuneable Diode Laser (TDL) sensing technology, the DF-740 is designed to measure contaminants in UHP-grade ammonia.
- DF-745 SGMax: A Tuneable Diode Laser (TDL) sensor-based trace moisture analyser designed for the measurement of diverse gas mixtures in specialty gas blending applications.
- DF-750: The DF-750 is a trace/ultra-trace moisture analyser optimized for measurements in the ultra-high-purity (UHP) gases used in 300mm semiconductor fabs.
- DF-750 ULTRA: The DF-750 ULTRA is a trace/ultra-trace analyzer optimized to deliver industry-best moisture measurements in the ultra-high-purity (UHP) gases used in 300mm semiconductor fabs.
- DF-760E: Designed for quality control applications in UHP bulk gases, the compact DF-760E analyzer is a unique solution for the dual measurement of trace and ultra-trace moisture (H2O) and oxygen (O2).
- DF-760E ULTRA: Delivering industry-leading quality control measurements for UHP bulk gases, the compact DF-760E NanoTrace ULTRA analyzer is a superior solution for the dual measurement of trace and ultra-trace moisture (H2O) and oxygen (O2).
For further information, please refer to the relevant datasheets. These can be found at https://www.servomex.com/resources/.
