Description
The AquaVolt+ provides precise, on-line moisture monitoring for high-purity applications, such as semiconductor manufacturing, specialty gas applications, mobile cart applications, and research and industrial labs.
Applications:
- Semiconductor manufacturing
- Refrigerant gases, such as C3H2F6, CF4, CH2F2, and CH3F, among others, used to etch polysilicon and for Chemical Mechanical Planarization (CMP)
- Specialty gas applications, including Silane used for wafer deposition and more
- Hexafluoroethane (C2F6) for semiconductor tool chamber cleaning, removal of silicon dioxide from silicon wafers, and plasma etch
- Government research and industrial laboratories. Example: DNA research for drug development and genetic therapies
- Shielding gases for orbital welding
- Aerospace and military
- Helium and Nitrogen Gases: ~ 0.5 to 1ppmV for tube trailer moisture verification
- Pressure Swing Adsorbers (PSAs) used in Helium Recovery
- Mobile cart applications
